SPINWAVE BASED NONDESTRUCTIVE MATERIAL, STRUCTURE,

专利名称：SPINWAVE BASED NONDESTRUCTIVE

MATERIAL, STRUCTURE, COMPONENT, ORDEVICE TESTING TOOLS

发明人：Hyunsoo YANG,Sankha Subhra

MUKHERJEE,Jae Hyun KWON

申请号：US14020329申请日：20130906

公开号：US20140097841A1公开日：20140410

专利附图：

摘要：Systems and methods for spinwave-based metrology in accordance with

embodiments of the disclosure involve generating and detecting spinwaves in a samplehaving a ferromagnetic material; and determining a material thickness, a materialintegrity measure, a presence of a manufacturing defect, a categorical type ofmanufacturing defect, and/or a manufacturing process statistic corresponding tospinwave behavior in the sample. In an embodiment, spinwaves are generated by way ofconcurrent exposure of a target measurement site of the sample to each of a biasmagnetic field and radiation (e.g., microwave or radio frequency radiation) produced by afirst set of integrated waveguides. A response signal corresponding to a behavior ofspinwaves within the target measurement site can be generated by way of a second setof integrated waveguides. Various embodiments of systems and methods for generatingspinwaves, detecting spinwaves, and calculating, analyzing, or monitoring one or moresample properties can be automated.

申请人：NATIONAL UNIVERSITY OF SINGAPORE

地址：SINGAPORE SG

国籍：SG

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