专利名称:Method and device for measuring the
thickness of an intermediate layer
发明人:LATTNER, WOLFGANG申请号:EP99108520.0申请日:19990504公开号:EP0959323A3公开日:20000426
专利附图:
摘要:The method involves coupling one pole of a voltage source to the upper andlower conductive layers (2,4). The opposite pole is coupled to a measuring point (7), whichpenetrates the upper conductive layer and the intermediate layer (3). The displacement
of the measuring point is detected as it is moved perpendicularly between the upper andthe lower conductive layers. The circuit is closed when the measuring point is connectedto either of the connecting layers, so the beginning and end of the measurement can bedetected. The beginning of the measurement can be taken as the beginning of the upperlayer, and the end of the measurement can be taken as the beginning of the lower layer.The upper layer thickness is then subtracted to obtain the intermediate layer thickness.An Independent claim for a thickness measuring device is also included.
申请人:ALCAN DEUTSCHLAND GMBH
地址:Hannoversche Strasse 1 D-37075 Göttingen DE
国籍:DE
代理机构:HOFFMANN - EITLE
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