Apparatus for cleaning residual material from an a

专利名称：Apparatus for cleaning residual material

from an article

发明人：Raschid Jose Bezama,John F. Harmuth,Jason

Scott Miller,Randall Jason Werner

申请号：US100262申请日：20011221

公开号：US200301128A1公开日：20030626

专利附图：

摘要：An apparatus in which opposed nozzle assemblies are utilized to clean residualmaterial, such as a metallic paste, from an article, such as a screening mask. Each of the

nozzle assemblies has a first set of nozzles for spraying a cleaning agent onto the articlein a first pattern to first chemically and mechanically remove residual material from thearticle. At least one of the nozzle assemblies has a second set of nozzles for spraying acleaning agent onto the article in a second pattern while simultaneously applying avoltage between the second set of nozzles and the article to then chemically andelectrolytically remove the remaining residual material from the article.

申请人：INTERNATIONAL BUSINESS MACHINES CORPORATION

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