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Apparatus for cleaning residual material from an a

来源:图艺博知识网
专利内容由知识产权出版社提供

专利名称:Apparatus for cleaning residual material

from an article

发明人:Raschid Jose Bezama,John F. Harmuth,Jason

Scott Miller,Randall Jason Werner

申请号:US100262申请日:20011221

公开号:US200301128A1公开日:20030626

专利附图:

摘要:An apparatus in which opposed nozzle assemblies are utilized to clean residualmaterial, such as a metallic paste, from an article, such as a screening mask. Each of the

nozzle assemblies has a first set of nozzles for spraying a cleaning agent onto the articlein a first pattern to first chemically and mechanically remove residual material from thearticle. At least one of the nozzle assemblies has a second set of nozzles for spraying acleaning agent onto the article in a second pattern while simultaneously applying avoltage between the second set of nozzles and the article to then chemically andelectrolytically remove the remaining residual material from the article.

申请人:INTERNATIONAL BUSINESS MACHINES CORPORATION

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