专利名称:Apparatus for cleaning residual material
from an article
发明人:Raschid Jose Bezama,John F. Harmuth,Jason
Scott Miller,Randall Jason Werner
申请号:US100262申请日:20011221
公开号:US200301128A1公开日:20030626
专利附图:
摘要:An apparatus in which opposed nozzle assemblies are utilized to clean residualmaterial, such as a metallic paste, from an article, such as a screening mask. Each of the
nozzle assemblies has a first set of nozzles for spraying a cleaning agent onto the articlein a first pattern to first chemically and mechanically remove residual material from thearticle. At least one of the nozzle assemblies has a second set of nozzles for spraying acleaning agent onto the article in a second pattern while simultaneously applying avoltage between the second set of nozzles and the article to then chemically andelectrolytically remove the remaining residual material from the article.
申请人:INTERNATIONAL BUSINESS MACHINES CORPORATION
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